SANTA CLARA, Calif. — Intel Corp. has scrapped its production plans to use 193-nm, argon-fluoride (ArF) lithography tools from Silicon Valley Group Inc. because of delays in tool shipments. The ...
SANTA CLARA, Calif. — Officials from Intel Corp. today insisted that ASM Lithography's move to drop 193-nm scanners developed by Silicon Valley Group Inc. will not impact Intel's chip-manufacturing ...
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